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- Abstract: Amorphous hydrogenated carbon films have been deposited with benzene in an electron cyclotron resonance (ECR) plasma system. 文摘:用苯作源气体在一个微波电子回旋共振离子体系统中沉积了含氢非晶碳薄膜，研究了沉积参数对膜的生长速率的影响。
- Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching (ECR-RIE) equipment to improve its property of weave. 摘要采用微波电子回旋共振等离子体反应离子刻蚀(ECR-RIE)装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
- High-voltage power supply(HVPS) is one of the important component in ECRH (Electron Cyclotron Resonance Heating). 负高压电源系统是ECRH系统的重要组成部分,其信号的传输是整个系统运行的关键。
- In addition, the requirement of delivering 18O2 beams from the electron cyclotron resonance ion source can be satisfied by the obtained 18O2 gas. 此外,制得的气体能够满足电子回旋共振离子源提供18O重离子束的实验要求。
- In this paper the etching (RIE) of poly-Si of the electron cyclotron resonance (ECR) reactive ion using CF 4 and Ar was reported. 报道了用CF4和氩气Ar作为工作气体的ECR反应离子刻蚀多晶硅 (poly Si)技术。
- Then the corresponding sigma matrix is given to further estimate the beam emittance extracted from electron cyclotron resonance ion source. 用旋转矩阵和聚焦矩阵重新推导了总的传输矩阵。
- Amorphous hydrogenated carbon films have been deposited with benzene in an electron cyclotron resonance (ECR) plasma system. 用苯作源气体在一个微波电子回旋共振离子体系统中沉积了含氢非晶碳薄膜，研究了沉积参数对膜的生长速率的影响。
- The numerical method for resolving the wave propagation and absorption of the electron cyclotron resonance(ECR) is proposed. 介绍了电子回旋共振(ECR)波的传播与吸收的数值求解方法。
- The plasma flow stream along the divergent magnetic field in an electron cyclotron resonance(ECR) plasma source has been simulated. 本文建立了一个物理模型，编写了数值程序，模拟了微波电子回旋共振（ECR）等离子体流的特性。
- A coating on NiTi alloys surfaces was prepared under diethylene glycol dimethyl ether (diglyme) microwave cold-plasma in electron cyclotron resonance conditions. 在微波电子回旋共振低温等离子体条件下,用二乙二醇二甲醚为试剂对镍钛合金进行表面改性。
- Fluorinated amorphous carbon(a-C:F) films were deposited using C_4F_8 and CH_4 as precursor gases by electron cyclotron resonance chemical vapor deposition (ECR_CVD). 采用电子回旋共振等离子体化学气相淀积(ECR-CVD)法;以C4F8和CH4为源气体制备了非晶氟化碳(a-C:F)薄膜.
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab-built ECR plasma etching system. 摘要电子迴旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- OSTRIKOV K N,DENYSENKO I B,TSAKADZE E L,et al.Characteristics of electron cyclotron resonance plasmas for large area ion source application[J].Journ Vac Sci Technol,2000,A20:2185. 丁振峰;霍伟刚;王友年.;射频电感性耦合等离子体调谐基片自偏压特性[J]
- Abstract: The latest developments of high charge state ECR(electron cyclotron resonance)ion sources in Institute of Modern Physics, Chinese Academy of Sciences are reviewed. 文摘:综述了中国科学院近代物理研究所近几年来高电荷态ECR离子源的最新进展。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab built ECR plasma etching system. 电子回旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- The latest developments of high charge state ECR(electron cyclotron resonance)ion sources in Institute of Modern Physics, Chinese Academy of Sciences are reviewed. 关键词：ECR离子源,高电荷态,束流强度,微波加热,磁镜场|全部关键词
- A coating on NiTi alloys surfaces was prepared under diethylene glycol dimethyl ether (diglyme) microwave cold plasma in electron cyclotron resonance conditions. 在微波电子回旋共振低温等离子体条件下，用二乙二醇二甲醚为试剂对镍钛合金进行表面改性。
- However, high cost, complicated ductwork, and assistant equipments such as plasma enhancing and electron cyclotron resonance are usually involved in most conventional atmospheric pressure CVD apparatus. 1) 搭建了三套低成本的CVD装置，它们分别是简单CVD装置，单一源化学气相淀积装置，ZnO薄膜的水汽外延装置。
- In view of its virtue of high degree of electron and ion generations, hot wire assisted hot wire assisted the microwave electron cyclotron resonance (MWECR) CVD is expected to deposit device quality a-Si:H at high deposition rate. 热丝辅助微波电子回旋共振化学气相沉积(MWECR CVD)方法具有电子和离子产生率高等优点,能在较高的沉积速率下获得器件级质量的a-Si:H 薄膜。
- Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method. 利用电子回旋共振(ECR)微波等离子体辅助化学气相沉积技术、工作气氛为丙酮;在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜.
