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- A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology. 基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关。
- Abstract: A double-ended tuning fork resonator is presented,which is fabricated by silicon bulk micromachining technology. 文章摘要: 应用体硅微机械加工技术，制作了一种双端固定音叉式谐振器。
- Micromachining technology is one of the important research subjects on the modern machining technology.It plays a vital role in the improvement of advanced manufacture. 微细加工技术是现代加工技术中的重要研究课题之一，对于先进制造技术的发展具有重大的意义。
- MEMS brings together silicon-based microelectronics and micromachining technology, making possible a smaller, more highly integrated and lower power transducer than would have otherwise been possible. MEMS带来了基于硅片的集成微电子和微机械元件的技术，使得相对于采用其他技术制造更小的，更高集成度的和更低能耗的传感器成为可能。
- The research status and new development,including MEMS micromachining technology,packaging technology and testing technology is introduced emphatically.The problems of MEMS are set forth. 介绍MEMS技术几个主要方面的研究现状和最新进展:MEMS的加工技术、封装技术、检测技术。阐述MEMS技术仍面临的问题。
- Although MEMS devices are generally fabricated using the surface micromachining technologies that develop from IC fabrication technologies. 虽然微型机电系统的制造通常使用基于集成电路工艺的平面制造技术,但由于MEMS器件的三维特性,使它与IC的制造有很大不同。
- Micromachining Technology with Bright Prospects 前程远大的微细加工技术
- Micromachining technology, MEMS devices and their applications are surveyed in Chapter 1. The development of micromachined accelerometer is also summarized. 论文的第一章对微电子机械系统及其器件设计、制造技术和应用等发展状况进行了综述，重点综述了微机械加速度传感器的研究进展。
- silicon micromachining technology 硅微机械加工技术
- High Performance Accelerometers with Advanced Bulk Micromachining Technology 带有静电自检测功能的高灵敏度加速度传感器
- Keywords Micromachining technology;PEMFC;self-breathing;mathematical model; 微机械技术;质子交换膜燃料电池;自呼吸;数学模型;
- Technology is a booming sector of the economy. 技术是一个迅速发展的经济部门。
- The compact disc is a miracle of modern technology. 激光唱片是当代技术的奇葩。
- The science and technology of space flight. 航天学，宇宙航行学研究宇宙飞行的科学及技术
- Large scale industry emerged only gradually as technology evolved. 大工业只是随着技术发展而逐渐开始存在的。
- POLYSILICON THIN FILM FLEXURE HINGE FABRICATED USING SURFACE MICROMACHINING TECHNOLOGY 基于微制造的多晶硅薄膜型柔性铰链
- I'd like to borrow a book a book on computer technology. 我想借一本计算机技术方面的书。
- He's keeping an eye out for modern trends in space technology. 他密切注意空间技术方面的新趋势。
- On the Developing Trend of Micromachine Technology 微特电机技术发展趋势探讨
- 今日热词
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- 深远海浮式风电平台 - deep-sea floating wind power platform
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- 京雄高速公路 - Beijing-Xiongan expressway
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- 农业及相关产业增加值 - the added value of agriculture and related industries
