The research status and new development,including MEMS micromachining technology,packaging technology and testing technology is introduced emphatically.The problems of MEMS are set forth.

• 介绍MEMS技术几个主要方面的研究现状和最新进展:MEMS的加工技术、封装技术、检测技术。阐述MEMS技术仍面临的问题。