MEMS brings together silicon-based microelectronics and micromachining technology, making possible a smaller, more highly integrated and lower power transducer than would have otherwise been possible.

• MEMS带来了基于硅片的集成微电子和微机械元件的技术，使得相对于采用其他技术制造更小的，更高集成度的和更低能耗的传感器成为可能。