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- 微机电系统IMUMEMS IMU
- 微机电系统中基于模态展开和边界元法的静电-结构耦合高效分析方法EFFICIENT APPROACH FOR COUPLED ELECTROSTATIC AND STRUCTURAL ANALYSIS OF MEMS VIA BOUNDARY ELEMENT METHOD AND MODAL EXPANSION
- 系统system
- 适用于微机电系统的自适应红外探测器的可调谐滤光器设计与开发(英文)Design and Development of Tunable Filters for MEMS Adaptive Infrared Detectors
- 基于微机电系统技术的微型气相色谱检测器在测定白酒微量乙酸乙酯中的应用The Application of a Miniaturized Gas Chromatographic Detector for the Determination of Ethyl Acetate in Chinese Spirits
- 近年来，基于MEMS(微机电系统)技术的微惯性传感器的研究与发展受到了广泛的重视。In recent years, the research and development of micro-inertial sensors based on MEMS technology has received wide attention.
- RF微机电系统的出现加上联邦通讯委员会的支持，可在未来促进更大规模的频谱共享。The emergence of RF MEMS and the FCC endorsement combine to push for greater spectrum sharing in days to come.
- 微机电系统杂志JMS Journal of microelectronic mechanical systems
- 微机电系统CADMEMS CAD
- 射频微机电系统RF MEMS
- 生物微机电系统BioMEMS
- 微机电系统封装micro electromechanical system packaging
- 微机电系统摩擦micro friction in MEMS
- 微机电系统设计micro- electro- mechanical system design
- 微机电系统电镀mieroeleetro-meehanieal system plating
- 微机电系统工艺MEMS technics
- 微机电系统技术MEMS technology
- 光学微机电系统MOEMS
- 微机电系统密码锁micro-electromechanical system code lock
- 微机电系统微构件MEMS microstructure
