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- The mechanism of anisotropic etching the construction design of silicon anisotropic etching and two-side etching technology to produce microaccelerometer have been discussed in the paper. 本文讨论了各向异性腐蚀的机理；硅的各向异性腐蚀设计；双面光刻等与微硅加速度计有关的超精细加工问题。
- New type of magnetic sensitivity transistor is based on SOI,whose design principle and process are expatiated,and whose recombination region is set by anisotropic etching technology in MEMS. 构成新型磁敏三极管的复合区采用MEMS中的各向异性腐蚀技术进行设置,给出了这种复合区的复合机理。
- Abstract: The characteristics and progress of lithography technique and plasma etching technology are summarized.Their physical mechanisms and current research problems are also explained. 文摘:介绍了光刻与等离子体刻蚀技术的特点与进展，阐述了等离子体刻蚀的物理机制与前沿问题.
- A dry etch technology for poly-silicon using Cl2, SF6 and N2 mixed gas has been developed on Tegal 1512e. Different effects of positive resist mask for LDD and SiO2 mask for SST on the process are discussed. 在Tegal1512e设备上,采用Cl_2、SF_6、N_2混合气体,开发了多晶硅干法腐蚀工艺,讨论了LDD的正胶掩膜及SST的SiO_2掩膜对工艺的不同影响。
- Etching Technology of Refractory Metals Multilayer 多层难熔金属的刻蚀工艺技术研究
- LITHOGRAPHY AND PLASMA ETCHING TECHNOLOGY 光刻与等离子体刻蚀技术
- deep reaction ion etching technology 深刻蚀技术
- with no need of etching technology 无刻蚀
- The etching technologies of ITO films suitable for laboratory operation, including gelatinization, border scouring, exposal, development, etching and so on ,are obtained after a series of experiments. 通过大锖实验摸索了一套适合实验室制作刻蚀ITO膜的工艺，其中包括涂胶、擦边、曝光、显影、刻蚀等。
- Modeling and simulation of reactive ion etching technology 反应离子刻蚀工艺仿真模型的研究
- Study of Under Bump Metal and Etch Technology of MCM MCM多层金属化及刻蚀技术研究
- That is a beautiful etching of a bird. 那是一只鸟的漂亮的蚀刻画。
- Etch Technology Breaking Through in Making VFD Screen-Grids 蚀刻技术在VFD栅网制作中的突破
- Research on Etching Technologies of Diamond 金刚石刻蚀技术研究
- Technology is a booming sector of the economy. 技术是一个迅速发展的经济部门。
- Hanging on the wall was a fine etching of the church. 挂在墙上的是一幅精致的教堂蚀刻板画。
- Research of monocrystalline silicon waveguide basis trough etching technology 单晶硅波导基槽刻蚀工艺的研究
- MAKE OF Ge FRESNEL MICROLENS ARRAYS USING REACTION ION ETCHING TECHNOLOGY 用反应离子刻蚀技术制作Ge菲涅尔微透镜列阵
- The compact disc is a miracle of modern technology. 激光唱片是当代技术的奇葩。
- The science and technology of space flight. 航天学，宇宙航行学研究宇宙飞行的科学及技术
