The etching technologies of ITO films suitable for laboratory operation, including gelatinization, border scouring, exposal, development, etching and so on ,are obtained after a series of experiments.

• 通过大锖实验摸索了一套适合实验室制作刻蚀ITO膜的工艺，其中包括涂胶、擦边、曝光、显影、刻蚀等。