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- The developments of MEMS, Micro Machining technology make it possible to fabricate Micro Turbine Engine(MTE). MEMS技术、微加工技术的发展,使得微型涡轮喷气发动机(Micro Turbine Engine,MTE)的制造成为可能。
- It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump. 对芯片的加工工艺流程进行了说明，同时对微泵进行了试验研究。
- Research progresses of laser trimming, laser drilling, laser cleaning, laser flexible routing and laser micro welding applied in the IC fabrication and packaging are given. 介绍了在集成电路制造封装中采用的激光微调、激光打孔、激光清洗、激光柔性布线和激光微焊技术。
- Advanced by the new-high technology and draught by the strong market demand, various micro sensors and MEMS made on the basis of integrated circuit technology and micro machining processing technology come to the force in the competition. 微电子机械系统(MEMS)技术是建立在微米/纳米技术(micro/nanotechnology)基础上的21世纪前沿技术，是指对微米/纳米材料进行设计、加工、制造、测量和控制的技术。 它可将机械构件、光学系统、驱动部件、电控系统集成为一个整体单元的微型系统。
- laser micro cladding electronic pastes 激光微敷电子胶（LMCEP）
- Laser micro - plasma spectroscopy 激光微等离子体光谱
- pulse electrochemical micro machining (PECMM) 脉冲电化学微细加工
- A high linear interface circuit for micro machined capacitive accelerometer is introduced.A switch phase demodulator is used in the circuit. 介绍了一种可用于微机械电容式加速度传感器的接口电路，该电路应用了开关型相敏解调电路，具有灵敏度高、线性好的特点，能测量微差分电容的变化。
- Keywords NTM;micro machining;hybrid;automation; 特种加工;微细化;复合化;自动化;
- E.B.Arkilic，K.S.Breuer and M.A.Schmidt，Mass flow and tangential momentum accommodation in silicon micro machined channels，J.Fluid Mech.，Vol.437（2001）29-43. 陈志铭，周期性电场与压力场联合引发之微流动特性的研究，国立中兴大学机械工程研究所硕士论文（2004）.
- Eberhart R C, Kennedy J.A new optimizer using particles swarm theory[A].Proc.Sixth International Symposium on Micro Machine and Human Science[C].Nagoya, Japan, l995. 夏永明;付子义;袁世鹰;等.;粒子群优化算法在直线感应电机优化设计中的应用[J]
- Some new application and development trend of smart materials, such as silicon, shape memory alloy, piezoelectric ceramics and super magnetic materials on micro machine are presented. 论述了微机械的发展现状,综述了硅、形状记忆合金、压电陶瓷、超磁致伸缩等智能材料在微型机械中的最新应用及发展趋势。
- J.Kennedy and R.Eberhart, A new optimizer using particle swarm theory, Proceedings of the Sixth International Symposium on Micro machine and Human Science, Nagoya, Japan, 1995, pp. 39-43. 赫然、王永吉、王青、周津慧，胡陈勇，一种改进的自适应逃逸微粒群算法及实验分析，软件学报，2005年，第16卷，第12期。
- Keywords Micro Machining;Ultraprecise Milling;Free Curves; 微细加工;超精密铣削;自由曲面;
- Laser Micro Photographic Instrument Used for Analysis in Aeronautical Materials Performance and Defect 激光显微光谱仪在航空材料性能与故障分析中的应用
- micro machine remote wind system 微电机遥风系统
- Keywords superresolution;phase plate;laser micro fabrication;optimization algorithm;compression ratio; 超衍射;相位元件;激光微加工;优化算法;压缩比;
- The study of adjustable spathic micro - laser(SMLD)[J]. 引用该论文 衣学斌;钟鸣;欧群飞;刘文兵.
- There is no single laser fit for all purposes. 没有单一种激光器能适用于各种用途。
- Keywords Abrasive Jet Machining（AJM）;unconventional machining;micro machining;experiment device; 磨料喷射加工（AJM）;特种加工;微细加工;实验装置;
