Some new application and development trend of smart materials, such as silicon, shape memory alloy, piezoelectric ceramics and super magnetic materials on micro machine are presented.

• 论述了微机械的发展现状,综述了硅、形状记忆合金、压电陶瓷、超磁致伸缩等智能材料在微型机械中的最新应用及发展趋势。