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- With the development of the Micro Electro Mechanical System(MEMS), mico-machining technologies grows rapidly . 微机电系统(MEMS)的发展,带动了微细加工技术的发展。
- Four fundamental manufacturing technologies namely bulk micromachining,surface micromachining,moulding and wafer bonding are introduced for Micro Electro Mechanical System(MEMS). 介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
- Because micro electro mechanical system(MEMS) inertial components are adopted,the attitude estimation system is small,light,low cost,and suit to micro carriers especially. 由于使用微电子机械系统(MEMS;Micro Electro Mechanical System)惯性器件;使得姿态估计系统的体积小、重量轻、造价低;特别适于微小型载体使用.
- During the last 10 years, the Micro Electro Mechanical System(MEMS) technology has made remarkable progress, and is possible to be integrated into the optical field. 在过去的十几年里,随着微机械加工技术的惊人发展,微机电系统(MEMS)与光学技术的结合应用成为可能,这种结合体被称为微光机电系统(MOEMS)。
- The micro function module, such as micro channel, micro chamber, micro pump, micro heater and sensor etc, are manufactured by the technology of Micro Electro Mechanical System (MEMS) on the substrate of glass or silicon. 聚合酶链式反应(PCR)微芯片是运用微电子机械系统(MEMS)技术在硅片或玻璃片等基片材料上加工一系列的微管道、微反应室及微阀、微加热器、微传感器等功能单元，利用芯片集成度高和比表面积大的特性，在芯片上实现快速PCR扩增。
- Wang W Y.Stiction and friction in micro electro mechanical systems[J].Chinese Engineering Science, 2000, 2 (3): 36-41. [3]王渭源.;影响微电子机械系统成品率和可靠性的粘合力和摩擦力[J]
- The Digital Micromirror Devices (DMD) technology is an important development direction of the Micro Electro Mechanical Systems (MEMS). 数字微镜装置（DMD）技术是微电子机械系统（MEMS）的一个重要发展方向。
- Hoping to tap the huge potential of MEMS (Micro Electro Mechanical Systems microphones), companies are gearing up to master the technology. 为了进一步挖掘微机电系统巨大的市场潜力，硅制麦克风生产商们都在加速掌握核心技术。
- Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining. 微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
- The rapid developments of micro electro mechanical systems (MEMS) make progress in the research on the tension measurements of minisize materials. 微电子机械系统技术的迅速崛起,推动了微型材料拉伸测试方法的发展。
- As a new technology, MEMS (micro electro mechanical system) technology emerged the micro electro technology and precise mechanical processing technology and incorporates micro electro and mechanism. 作为一门新兴技术,MEMS(micro electro mechanical system微电子机械系统)技术将微电子技术和精密机械加工技术融合在一起,实现了微电子与机械的一体化。
- Micro Electro Mechanical Systems(abbreviated as MEMS), is a system device which uses micro manufacturing technology combining the mechanical unit, sensor, executing organ and electronic element to a micro base plate. 微机电系统(Micro Electro Mechanical Systems ,简称MEMS)是通过微制造技术将机械单元、传感器、执行器件和电子元件整合到一片微基板上的系统装置。
- MEMS (Micro Electro Mechanical System ) 微型机电系统（MEMS）
- MEMS (Micro Electro Mechanical System) 微机电系统
- micro electro mechanical system (MEMS) 微机电系统
- This dissertation takes Micro Electro Mechanical Systems (MEMS) based inertial sensors as measure element to study key technologies of the micro strapdown inertial attitude measurement system. 本文以微机械(MEMS)惯性器件为测量元件，开展微小型捷联式惯性姿态测量系统的关键技术研究。
- micro electro mechanical system technology 微电子机械系统技术
- micro electro mechanical system(MEMS) 微机电技术（MEMs）
- WT5BZ]The development of CAD used in micro electro mechanical system software is still in an initial stage. How to start on a high point depends on the degree of acquaintanceship to the previous analogous system and to the current technology. MEMS cad( cad used in Micro-Electro-Mechanical System )的发展还处在一个初级阶段 ,是否能站在一个高起点上主要取决于对该领域相似问题的认识程度和对新技术的掌握程度。
- Micro Electro Mechanical systems (MEMS) are integrative micro-device systems that consist of micro-sensor, micro-actuator, controlling and signal processing circuit, communication interface and electrical source. 微电子机械系统(Micro Electro Mechanical systems，简称MEMS)是由微传感器、微执行器、信号处理和控制电路、通讯接口和电源等部件组成的一体化的微型器件系统。
