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- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日来，对IC元件制造而言，由于金属铜内连接双镶嵌制程的需求，电镀铜也已经变成一项重要制程步骤。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金属化的双大马士革处理和面阵列芯片封装互连的C4(倒装)技术使电化学技术置于最复杂的制造工艺技术之间。
- dual damascene process 双嵌入（双大马士革）工艺
- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等离子体工艺对90nm铜大马士革工艺器件的损伤.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已经被用来替代Al-Cu合金连线和W 塞，因为与铝相比，Cu有较高的导电率与较强的抗迁移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/低介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(DRAM)和逻辑电路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(RAM)逻辑电路器件中。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介绍了基本的铜互连布线技术 ,包括单、双镶嵌工艺 ,CMP工艺 ,低介电常数材料和阻挡层材料 ,及铜互连布线的可靠性问题
- The results indicate the stress of copper interconnects generates in the metallization and the thermal stress caused by thermal mismatch during the Damascene process is the main stress. 对测量结果的分析得出金属薄膜的淀积是造成铜互连线中应力的主要原因，热应力在铜互连线应力中占较大比例，热处理后铜互连线中应力减小。
- Copper/low k dual damascene processLI 双嵌入式低k介电层/铜工艺技术
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 无中间层双大马士革中FSG刻蚀技术研究
- The road opened out into a dual carriageway. 这条路已扩展成了复式车行道。
- It is a leap in the process of cognition. 这是认识过程的一次飞跃。
- A product of a document copying process. 文件复制过程的一种产品。
- The new process extracts oil from shale. 这一新过程可从页岩里提炼出石油。
- The project is not finished but is till in process. 该项工程尚未结束，仍在进行之中。
- The process of applying and rubbing in an ointment. 涂油使用以及用油膏擦的过程
- The act or process of pushing or thrusting out. 推，掷推出或掷出的行为或过程
- dual damascene 双大马士革
- This part of the assembly process is now fully automated. 装配过程的这一部分现在是全自动的。
