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- The effect of nitrogen on oxygen precipitate profile in Czochralski (CZ) silicon wafer is investigated. 摘要研究了氮在退火过程中对直拉硅片中的氧沉淀分布的影响。
- However, oxygen precipitate nucleation and denuded zone of NCZ silicon in intrinsic gettering processes have been systematically investigated. 但是，到目前为止，国际上还没有系统地研究过微氮单晶硅在内吸杂工艺中氮对氧沉淀形核以及洁净区的影响。
- Several kinds of silicon defects, such as oxygen precipitate, process induced defects and defects in gettering are discussed using TEM. 通过TEM观察了矽中氧沉积、工艺诱生缺陷等并对之进行了分析。
- The effect of high temperature in rapid thermal process (RTP) on the dissolution of oxygen precipitate generated by two-step (low-high) annealing is investigated. 摘要通过对已经过两步（低－高）退火的大直径直拉矽单晶片进行高温快速热处理，研究矽中氧沈淀被高温快速热处理消融的情况。
- Oxygen precipitates (useful for gettering) can reduce the yield strength (critical shear stress) up to fivefole. 氧沉淀(可用作吸杂)会使屈服强度(临界剪应力)降低为五分之一。
- Moreover, the mechanism for the dissolution of oxygen precipitates by RTP is discussed. 另外，计论了快速热处理消融氧沈淀的物理机制。
- Finnaly, the nitrogen’s effects on oxygen precipitates are also classifies in the rising and ramping processing. 最后，文中还研究了升温过程和降温过程中氮对氧沉淀的影响。
- In the case of an N_2/O_2 mixed atmosphere,the FPD density and the oxygen precipitation density decrease with the increase of O_2 content. 对于N2/O2混和气氛;随着O2含量的增加;FPDs和氧沉淀诱生缺陷密度变小;纯O2气氛下预处理后硅片中FPDs和氧沉淀诱生缺陷密度最低.
- The effects of the transition metals copper and nickel on oxygen precipitation in Czochralski silicon under a rapid thermal process are investigated. 摘要研究了快速热处理工艺下直拉单晶硅中过渡族金属铜、镍对内吸杂工艺中氧沉淀形成规律的影响。
- It is found that RTP is a rapid and effective way to dissolve oxygen precipitation in comparison with conventional furnace annealing. 实验发现，RTP是一种快速消融氧沉淀的有效方式，比常规炉退火消融氧沉淀更加显著。
- They acted with precipitate haste. 他们鲁莽仓促地采取了行动。
- Water contains hydrogen and oxygen. 水含有氢和氧。
- Keywords oxidation-induced stacking faults;Cz-silicon;oxygen precipitate; 氧化诱生层错;直拉硅单晶;氧沉淀;
- Oxygen enters into many compound bodies. 氧是许多化合物的组成部分。
- Keywords fast neutron irradiation,metastable defect,oxygen precipitate; 快中子辐照;亚稳态缺陷;氧沉淀;
- It is verified that the high temperature in RTP can efficiently dissolve the existing oxygen precipitates, indicating that the annealing temperature other than time is the determinative factor for the dissolution of oxygen precipitates. 研究证实：高温快速热处理可以显著地消融氧沈淀，氧沈淀消融的决定性因素是热处理温度。
- The effect of rapid thermal annealing (RTA) ambient on denuded zone and oxygen precipitates in Czochralski(CZ) silicon wafers is studied in this paper.N2 and a N2/NH3 mixture are used as RTA ambient. 研究了N2和N2/NH3混合气两种不同气氛快速退火处理硅片对洁净区和氧沉淀分布的影响.;研究发现:N2/NH3混合气氛处理的硅片在后序热处理中表层形成很薄的洁净区同时体内形成高密度的氧沉淀;
- Mars is too dry and poor in oxygen. 火星上面过于干燥，并且缺乏氧气。
- All this will precipitate an economic crisis. 所有这些会促成经济危机。
- Water is composed of hydrogen and oxygen. 水由氢和氧组成。
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