In the case of an N_2/O_2 mixed atmosphere,the FPD density and the oxygen precipitation density decrease with the increase of O_2 content.

• 对于N2/O2混和气氛；随着O2含量的增加；FPDs和氧沉淀诱生缺陷密度变小；纯O2气氛下预处理后硅片中FPDs和氧沉淀诱生缺陷密度最低.