Metal aluminum films were deposited on AAO templates by radio-frequency magnetron sputtering. 用射频磁控溅射法在阳极氧化铝模板表面制备了金属铝膜。
Thin film manganin gages and ytterbium gages were fabricated by magnetron sputtering.Meanwhile, ytterbium gages were prepared by vacuum evaporation. 摘要采用磁控溅射法制备锰铜薄膜,溅射和真空蒸发法制备镱薄膜。