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- 袖珍溅射PIG离子源A compact sputtering PIG ion source
- 离子源的溅射特性及其对ZnS薄膜折射率的影响Study on sputter property and effect of ion source on refractive index of ZnS film
- 中文关键词：气离溅射、离子源、阳极层流、溅射、氮化钛、离子镀膜、中频、脉冲直流。KEYWORDS : GIMS, ion source, anode layer, sputtering, TiN, ion plating, medium frequency, pulsed DC.
- 用微波电子自旋共振等离子源离子注入增强溅射沉积法在玻璃表面制备氧化铟膜Preparation of Indium Oxide Film on Glass Surface Using Sputtering Deposition Synchro-enchanced by Microwave ECR Plasma Source lon-implantation
- 溅射态as-deposited
- 射频离子源radio-frequency ion source
- 溅射角Deposition surface inclination angle
- 预溅射presputter
- 射频火花离子源radio-frequency spark ion source
- 交替溅射alternating sputtering
- 溅射功率sputtering power
- 用于薄膜制备的射频宽束离子源的设计Development of Broad Beam RF Ion Source for Thin Film Growth
- 溅射气压sputtering pressure
- 自制激光离子源射频离子阱质谱仪性能的测试Test of the Performance of the Self-Designed Radio-frequency Ion Trap Mass Spectrometer Interfaced with a Laser Desorption Ion Source
- 间歇溅射fitful-sputtering
- 溅射时间sputtering time
- 磁空溅射magnetron sputtering
- 中频溅射mid-frequency sputtering
- 溅射制备DC sputtering
- 磁控溅射铝aluminium control in magnetron sputtering
