MBE has a lot of unique advantages because it supplies precise controls of the film growth processes and conditions far from equilibrium. 由于它能对薄膜生长进行精确的控制，并且是一种远离平衡态的生长技术，因而它具有许多独特的技术优势。
The structrures of diamond micromotor and microresonator are fabricated to demonstrate two kinds of selective growth thechnologies of CVD diamond film respectively. 以金刚石微马达和微型谐振子结构制备为例，介绍化学气相沉积金刚石薄膜的两种选择生长技术。
