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- surface micromachined device 表面硅微器件
- A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology. 基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关。
- Using surface micromachining, the sector plates are fabricated to verify the theoretical analysis. 利用面型微细加工制程，扇行平板结构被制造出来用以验证理论分析。
- Furthermore, the surface micromachining is able to fabricate various optical devices, hinges and latches for integrating with micro bench. 第三则是藉由面型微加工技术可制作各式各样微光学元件、微绞链及微卡榫，整合于微平台上。
- Although MEMS devices are generally fabricated using the surface micromachining technologies that develop from IC fabrication technologies. 虽然微型机电系统的制造通常使用基于集成电路工艺的平面制造技术,但由于MEMS器件的三维特性,使它与IC的制造有很大不同。
- The circular plates have been successfully fabricated through surface micromachining to examine the feasibility of the proposed nondimensional numbers. 当>0.;9903，结构不会被吸附，而当<0
- Analysis of Response of the Surface Micromachined Cantilever Under Vibration 表面加工微多晶悬梁在振动载荷下的响应分析
- Four fundamental manufacturing technologies namely bulk micromachining,surface micromachining,moulding and wafer bonding are introduced for Micro Electro Mechanical System(MEMS). 介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
- The advantages of microcap are superior to the thin film poly-silicon made by the surface micromachining technique on the quality and mechanical properties. 藉由此电铸技术所制作的微金属帽盖与微机械加工技术所制作的薄膜聚合矽而言，微电铸技术制程优点多且品质较好。
- The gas bubbled to the surface of the water. 气体变成气泡升上水面。
- For the detector design ,MEMS surface micromachining techniques were incorporated toFabricate a simple micro polysilicon air-bridge heater filament with integrated polysilicon electrodes. 有关这个检测器的设计，是将MEMS表面微切削加工技术与带有集成的多晶硅电极的简单微多晶硅空运线加热丝的制作结合在一起。
- The surface of the liquid gradually crusted over. 液体表面渐渐地结了一层皮。
- A breeze ruffled the surface of the lake. 一阵微风吹皱了湖面。
- To meet the needs of surface micromachining and CMOS process,reasonable test structures and their improvements for measuring thermal conductivity of the MEMS thin films are required. 对表面加工和CMOS工艺,需要进行测试结构的合理设计和提高薄膜热导率测量的精确度。
- A wave broke across the surface of the pool. 一个波浪从池水表面掠过。
- The calm water surface is very much like a mirror. 那平静的水面十分象一面镜子。
- Acid had pitted the surface of the silver. 酸把银器的表面腐蚀了。
- Application of First-and-second Order Release-etch Modeling for Surface Micromachined Structures 一、二阶释放模型在表面微机械中的应用
- He is honest only on the surface. 他只是表面诚实而已。
- Test structure for determination of thermal conductivity of surface micromachined polysilicon thin films 表面加工多晶硅薄膜热导率测试结构
