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- On the other hand, it is essential to prepare high quality silicon nitride thin film for gate insulator layer of TFT in order to get excellent TFT. 与此同时,制备高质量的栅绝缘层用氮化硅薄膜也是制备高性能薄膜晶体管(TFT)这一课题的需要。
- There are three types of photoexcitation-photoemission processes for electron-holes in the photoluminescence from silicon-rich silicon nitride thin films. 摘要对于富纳米硅氮化硅薄膜的光致发光，其电子-空穴对存在3类光激发-光发射过程。
- Progress and Preparation Methods of Silicon Nitride Thin Film 氮化硅薄膜制备方法现状综述
- Silicon Nitride Thin Films Prepared by Magnetron Reaction Sputtering 磁控反应溅射法低温制备氮化硅薄膜
- Green-blue Luminescence from the Silicon-rich Silicon Nitride Thin Films 富硅氮化硅薄膜的荧光发射
- silicon nitride thin film 氮化硅薄膜
- The devices were passivated by the thin film of Photo-CVD silicon nitride, we found that the reliability of the devices was to be raised. 采用光化学气相淀积(光CVD)氮化硅薄膜进行器件的表面钝化;使整个器件提高了可靠性.
- silicon nitride thin films SiNx薄膜
- PREPARATION METHODS OF SILICON NITRIDE THIN FIMS 氮化硅薄膜的制备技术
- Silicon nitride (SiNx) thin films 氮化硅薄膜
- In this paper, preparing nanocrystalline carbon nitride thin films has been investigated by using Arc Discharge and dc Hollow Cathode Discharge (HCD). 本文主要论述了采用弧光放电(Arc Discharge)和直流空心阴极放电(DC Hollow Cathode Discharge)两种方法来制备纳米陶瓷氮化碳薄膜。
- In order to obtain cubic boron nitride thin films the working gas pressure must be appropriate, otherwise the cubic phase can not be synthesized. 在其他条件不变的情况下,研究了工作气压对制备立方氮化硼薄膜的影响。
- Study of Internal Stress in Silicon Nitride Dielectric Thin Films 氮化硅介质薄膜内应力的实验研究
- XPS study of cubic boron nitride thin films 立方氮化硼薄膜表面的XPS研究
- Keywords Sapphire;Infrared;Antireflective and Protective Thin Film;Silicon Dioxide;Silicon Nitride;Radio Frequency Magnetron Reactive Sputtering;Rain Erosion Test;High Temperature Strength; 蓝宝石;红外;增透保护膜;氧化硅;氮化硅;射频磁控反应溅射;雨蚀试验;高温强度;
- Inner Stress of Boron Carbon Nitride Thin Films 硼碳氮薄膜的内应力研究
- Amorphous iron nitride thin films 非晶氮化铁薄膜
- It is also used as the etchant for etching Aluminum and Silicon Nitride film in semi-silicon IC. 在硅平面晶圆集成电路生产中，用于铝及氮化硅的蚀刻；
- The first is a silicon nitride window sandwich (picture below). 第一种是氮化硅夹心窗（下图）。
- Structure and magnetic properties of iron nitride thin films 氮化铁薄膜的结构及磁性研究
