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- silicon micromachining technology 硅微机械加工技术
- Keywords: modulation, extinction ratio, silicon micromachined, Fabry-Perot, light switch, modulator. 关键词:调制,对比,矽微加工,法布里-珀罗,光开关,调制器。
- Vibratory silicon micromachined gyroscopes need to check extremely small signal from all kinds of noises. 振动式硅微陀螺仪要在各种噪声干扰下,检测出极其微弱的有用信号。
- Microelectronics Mechanical System And Silicon Micromachining Technique 微电子机械系统及硅微机械加工工艺
- The electromechancial interface model of silicon micromachined gyroscope is established.The impacts of these parasitic capacitances on interface circuit are analyzed. 建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响。
- The capacitances in the structure of silicon micromachined gyroscope( SMG) are analyzed, in order to reduce parasitic capacitances in the structure and increase the signal noise ratio (SNR). 为减小杂散电容提高信噪比,分析了硅微机械陀螺仪结构中的电容。
- The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass,because of system structure,feedback control is the only choice to control the proof mass. 以单自由度硅微振动轮式陀螺仪的检测动极板为控制对象,系统的结构特性决定了只能选择反馈控制方式对其进行控制。
- Keywords microelectrode;thin-film microelectrode device;silicon micromachining techniques; 微电极;薄膜微电极器件;硅微机械加工技术;
- The silicon chips are less than a millimeter thick. 这些矽片厚度不足一毫米。
- Vacuum packaged silicon micromachined gyroscope 真空封装的硅微陀螺仪
- silicon micromachined gyroscopes 硅微机械陀螺仪
- silicon micromachined gyroscopes(SMG) 硅微机械陀螺仪
- silicon micromachined vibratory gyroscope 硅微振动陀螺仪
- Key words:silicon micromachined gyroscopes(SMG); 关键词:硅微机械陀螺仪;
- Silicon micromachined vibratory gyroscope (SMVG) 硅微陀螺仪
- silicon micromachined fluid sensor 硅微机械流体传感器
- silicon micromachined resonant accelerometer 谐振式加速度计
- silicon micromachined shock accelerometer 冲击硅微机械加速度传感器
- The entire content of a book will be located on a single silicon chip. 整本书的内容只用一片硅芯片就可以装下。
- silicon micromachined gyroscope(SMG) 硅微陀螺仪