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- Keywords: modulation, extinction ratio, silicon micromachined, Fabry-Perot, light switch, modulator. 关键词:调制,对比,矽微加工,法布里-珀罗,光开关,调制器。
- Vibratory silicon micromachined gyroscopes need to check extremely small signal from all kinds of noises. 振动式硅微陀螺仪要在各种噪声干扰下,检测出极其微弱的有用信号。
- The electromechancial interface model of silicon micromachined gyroscope is established.The impacts of these parasitic capacitances on interface circuit are analyzed. 建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响。
- The capacitances in the structure of silicon micromachined gyroscope( SMG) are analyzed, in order to reduce parasitic capacitances in the structure and increase the signal noise ratio (SNR). 为减小杂散电容提高信噪比,分析了硅微机械陀螺仪结构中的电容。
- The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass,because of system structure,feedback control is the only choice to control the proof mass. 以单自由度硅微振动轮式陀螺仪的检测动极板为控制对象,系统的结构特性决定了只能选择反馈控制方式对其进行控制。
- Vacuum packaged silicon micromachined gyroscope 真空封装的硅微陀螺仪
- silicon micromachined gyroscopes 硅微机械陀螺仪
- silicon micromachined gyroscopes(SMG) 硅微机械陀螺仪
- silicon micromachined vibratory gyroscope 硅微振动陀螺仪
- Key words:silicon micromachined gyroscopes(SMG); 关键词:硅微机械陀螺仪;
- Silicon micromachined vibratory gyroscope (SMVG) 硅微陀螺仪
- silicon micromachined fluid sensor 硅微机械流体传感器
- silicon micromachined resonant accelerometer 谐振式加速度计
- silicon micromachined shock accelerometer 冲击硅微机械加速度传感器
- silicon micromachined gyroscope(SMG) 硅微陀螺仪
- Study on a Silicon Micromachined Gyroscope with Fence Structure 一种栅型结构微机械陀螺的研究
- The silicon chips are less than a millimeter thick. 这些矽片厚度不足一毫米。
- Silicon Micromachined Gyro Driving by Angular Rate of the Rotating Substrate 利用旋转载体自身角速度驱动的硅微机械陀螺
- A New Closed-loop Driving Circuit of Silicon Micromachined Vibratory Gyroscope 一种新型硅微陀螺仪闭环驱动方案的研究
- Design of Silicon Micromachined Acceleration Switch with Cross Beams 一种交叉梁硅微加速度开关的设计