silicon base

• 硅衬底

silicon base的用法和样例：

例句

1. The characteristics and requests of micromachining for silicon based sensors are introduced.The conventional methods of si substrate microfabrication are briefly described.
   叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。