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- Research the technology of improve the fabrication of piezoelectric thin film, microminiaturization of accelerometer structure. 并研究改善压电薄膜制造之技术，微型加速计结构之微小化。
- A basic structure of piezoelectric thin film microsensor is designed in this paper, its working principle is researched, and the optimization parameter and goal are chosen. 摘要通过经验设计出压电薄膜微传感器的基本结构，研究了压电薄膜微传感器的工作原理，选定了优化参数和优化目标；
- Then by using software of finite element ANSYS7.0 we optimizaed the piezoelectric thin film microsensor structure, and analyzed the influence of its structural dimension on sensitivity and linearity. 然后利用有限元软件ANSYS7.;0进行优化设计，对压电薄膜微传感器的结构尺寸对其线性度和灵敏度的影响进行分析；
- A novel microforce sensor with microcantilever structure based on PT/PZT/PT piezoelectric thin films is proposed. 提出了一种基于PT/PZT/PT压电薄膜微悬臂梁结构的微力传感器。
- aluminum nitride piezoelectric thin film 氮化铝压电薄膜
- piezoelectric thin film transducer 压电薄膜换能器
- Finite Element Simulation of Cylindrical Piezoelectric Thin Film Micromotor 柱状薄膜型压电微电机的有限元模拟
- AlN Piezoelectric Thin Film Prepared by Reactive Magnetron Reactive Sputtering 衬底温度对反应磁控溅射制备AlN压电薄膜的影响
- Recent Developments in AIN Piezoelectric Thin Films AIN压电薄膜研究进展
- This design is one new piezoelectricity actuation declines the crank rocker organization, including plates has rocking bar of, the slide, the crank and the rocking bar the pair of piezoelectricity thin film composes. 此设计是一种新型压电驱动式微曲柄摇杆机构，包括镀有双压电薄膜之摇杆、滑块、曲柄及摇杆所组成。
- THE DEVELOPMENT OF ZnO/AIN COMPOSITE PIEZOELECTRIC THIN FILMS ZnO/AlN复合压电薄膜的研制
- A Novel Integrated Micro-mirror Based on Piezoelectric Thin Film Converse Piezoelectric Effects 一种基于压电薄膜逆压电效应的新型集成微镜
- Piezoelectric Thin Film Ultrasonic Transducers Used in High Temperature Nondestructive Testing 一种用于高温无损检测的超声薄膜换能器
- Keywords Hydrothermal method;Lead zirconate titanate;Piezoelectric thin film;Micropump; 水热法;锆钛酸铅;压电薄膜;微泵;
- piezoelectric thin film 压电薄膜
- AIN piezoelectric thin film AIN压电薄膜
- PZT piezoelectric thin film PZT压电薄膜
- Abbreviation of Thin Film Transistor. 薄膜晶体三极管的缩写。
- A thin film formed on the surface of the pulp. 纸浆表面结了一层膜。
- Piezoelectric thin films 压电薄膜
