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- The aerial image qualities of depth of focus (DOF) and optical proximity effect are simulated with the lithography simulation software PROLITH. 利用光刻仿真软件PROLITH,进行了掩模版空间成像的焦深(DOF)和光学临近效应的仿真。
- Optical proximity effect correction(OPC) 光学邻近效应校正
- Optical Microlithography with Phase-Shifting Mask and Optical Proximity Effect Correction 相移掩模和光学邻近效应校正光刻技术
- Keywords Lithographic Simulation;Optical Proximity Effect;Design For Manufacturability;Optical Proximity Correction;Layout Verification; 光刻仿真;光学邻近效应;可制造性设计;光学邻近校正;版图验证;
- Optical Proximity Correction;OPC;Dynamic Programmable Logic Array;DPLA;Optical Proximity Effect;OPE;Critical Dimension;CD 关键词:光学邻近修正;动态可程式规划逻辑阵列;光学邻近效应;关键尺寸
- optical proximity effect 光学邻近效应
- Very Low Proximity Effect Losses. 极低的邻近效应损耗。
- The ’80s-era mic placement was around 1" away from the head to get the “proximity effect. 80年代的麦克摆位都把麦克放置到距鼓皮1英寸左右的位置以得到“亲近感”。
- OPC (Optical Proximity Correction) has developed to be a part of EDA framework, which is primarily used to increase the achievable resolution and pattern transfer fidelity. 光学邻近效应修正(Optical Proximity Correction，OPC)已成为半导体制造不可缺少的技术，同时发展为电子设计自动化(Electronic Design Automation，EDA)框架中的重要组成部分。
- T. H. P. Chang, Proximity Effect in Electron-Beam Lithography, J. Vac. Sci. Technol., B, Vol. 12, No. 6, p. 1271, 1975. 吴玫贞;电子束微影邻近效应参数测定与邻近效应修正之研究;交通大学应化所硕士论文;1997.
- Skin/ proximity effect is the dominative factor determining the current distribution among layers. 由于其零电阻特性，在相同的结构中，超导体表现出比常规导体大得多的临近效应。
- Piezoresistivity of ECAC may involve proximity effect, microcrack and the staggered arrangements of conductive pass-ways due to shear strength of aggregates. 压敏产生的原因是导电沥青混凝土试件的压缩邻近效应、微裂纹和石料间的剪切力使部分导电通路错位。
- We have measured the I-V characteristics,iC(T) and Tc of Sn-Ag proximity effect bridges,obtaining Some interesting results. 我们测量了Sn-Ag邻近效应桥的I-V特性、Ic(t)和Tc;并用唯象理论分析和解释所得的结果.
- However, at high frequencies, skin and proximity effect losses in the planar windings become significant, and parasitics cannot be ignored. 这些资料的取得，不论是从实测量得或透过有限元素分析获得，均须耗费大量时间。
- It may also be used to compensate for proximity effect or to reduce the low frequencies that can make an instrument sound dull or “muddy. 还可用它来补偿邻近效应，或降低可使乐器声音显得沈闷或“拖泥带水”的低频部分。
- Furthermore, the parameters acquired by this method are successfully used for proximity effect correction in electron-beam lithography on the same experimental conditions. 此外，用此方法提取的电子散射参数被成功地用于相同实验条件下的电子束临近效应校正。
- Research on Optical Proximity Correction Technology 集成电路光学校正技术研究
- Optical Proximity Correction (OPC) 光学邻近效应校正
- optical proximity correction( OPC ) 光学邻近校正
- By comparing Fiske step voltage, the Al peak in AVS and distortion I-V characteristic it is confirmed that the proximity effect by normal Al between the AlOx and Nb is existent. The result was compared with the McMillan theory. 由Fiske台阶电压，AVS中的Al峰和I－V特性的畸变，证实了结中Al/Nb间由常态Al而引起的亲近效应的存在，并用McMillan理论作了讨论。
