Depth crystalline evolution property for microcrystalline Si films deposited by ion-beam sputtering was studied. 研究了离子束溅射制备微晶硅薄膜的生长纵向结晶演化过程。
Besides, thin-film silicon technologies have also been developed to place a thin film of amorphous or microcrystalline silicon onto flat large-area substrates such as glass. 另外,薄膜硅技术也被开发出来,将非晶硅或者微晶硅薄膜放到玻璃那样的平的大面积衬底上。