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- Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree. 针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。
- micro gas pressure sensor 微气压传感器
- A low gas pressure sensor based on micro-hotplate(MHP) is designed and successfully fabricated by a standard CMOS process followed by surface micromaching. 研制了一种采用CMOS工艺和表面牺牲层技术加工的微热板式低气压传感器。
- Fabrication process and working principle of thermal gas pressure sensors based on a surface-machining micro-hotplate(MHP) are presented. 给出了采用牺牲层技术制作的微热板式气压传感器的加工工艺和工作原理。
- Design and thermal analysis of gas pressure sensor with micro-hotplate 微热板式气压传感器结构设计与热分析
- The micro gas sensor is a device of new generation, which is made through microelectronic, micromachining and thin film technologies. 微结构气敏传感器是利用微电子、微机械和薄膜等技术制作的新一代气敏元件。
- Abstract: The micro gas sensor is a device of new generation, which is made through microelectronic, micromachining and thin film technologies. 文摘:微结构气敏传感器是利用微电子、微机械和薄膜等技术制作的新一代气敏元件。
- E620018 "Air pressure sensor alarm. “发现气压下降。”
- They measure gas pressure five times per hour. 他们每小时测量五次气压。
- E620057 "Air pressure sensor alarm. Ignore? “发现气压下降，是否忽略?”
- AK series mechanical strain pressure sensor. AK系列应变式压力变送器；
- Gas pressure due to the materials inside the star. 第一种向外压力是恒星物质所造成的。
- This RNID doormat has a pressure sensor underneath. 这种RNID擦鞋垫的下面有一个压力传感器。
- Gas pressure gauge and fill valve. 气体压力表及充气阀。
- The article research into the pressure sensor which is the silica pressure resistance with the micro engine processing technology. 本论文的内容正是采用微机械加工技术，开展对硅压阻式压力传感器的研究。
- The gas pressure is adjusted so as to balance the beam. 通过调整气体的压力可以使天平横梁平衡。
- Then the gas pressure builds up until the volcano erupts. 这样，气体压力就会越来越大，以致引起火山爆发。
- Study of Pressure Sensor Based on Fiber Loop Ringdown[J]. 引用该论文 张卫华;刘波;罗建花;董孝义.
- The micro gas turbine distributed energy supply system which uses the natural gas cleanly, efficiently and flexibly has been given more attention. 摘要微型燃气轮机分布式供能系统能够实现天然气清洁、高效、灵活利用，目前已得到重视和应用。
- The accounting model and matrix model of thermoeconomics are implemented to study the micro gas turbine with heat recuperator. 采用会计模式和矩阵模式热经济学方法对回热循环微型燃气轮机系统进行了分析和研究。
