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- FSG, as one kind of low k dielectric film, is very similar with SiO2 in structure and deposition, and can be well used in 0.18-0.13um ULSL. 氟掺杂的氧化硅玻璃（FSG）作为低介电常数材料的一种，它的制备工艺、结构和性能更接近二氧化硅，足以满足0.;18微米甚至0
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介绍了基本的铜互连布线技术 ,包括单、双镶嵌工艺 ,CMP工艺 ,低介电常数材料和阻挡层材料 ,及铜互连布线的可靠性问题
- The synthesis, structure, properties and process interaction of low k dielectrics are reviewed.Characterization techniques for low k dielectric films are summarized. 综述了低介电常数介质薄膜的制备方法、结构与性能表徵、工艺兼容性等领域的最新进展。
- High k dielectric HfO 2 films were deposited on p type Si(100) substrates by e beam evaporation. 使用高真空电子束蒸发在p型Si(1 0 0 )衬底上制备了高kHfO2 薄膜 .
- The equivalent oxide thickness (EOT) of an HfO_2 high k dielectric is extracted in two steps. 分两步提取了HfO2高k栅介质等效氧化层厚度(EOT).
- The material, utilized as high- k dielectric, contains hafnium, there is no other information about it. 这些材料，利用高k电介质，包含铪，没有任何其他信息。
- A key problem in chip fabrication is that the new polish method for electromigration and ultra-low K dielectric and Cu electroplating level. 电迁移问题和集成超低k电介质材料与Cu镀层的新抛光方法是芯片制造中的一个关键问题。
- NTBI induced device degradation can be suppressed by a SiN capping layer between Poly-Si gate and high k dielectric layer. 在闸极与高介电常数介电层间使用氮化矽可有效抑制负偏压温度不稳定性的现象。
- Second,an approach using flat-band capacitance is demonstrated for extracting the EOT of a high k dielectric,without the effects of inversion or accumulation capacitance. 其次;给出了一种利用平带电容提取高k介质EOT的方法;该方法能克服量子效应所产生的反型层或积累层电容的影响.
- low k dielectric layer 低k介质埋层
- The government is trying to keep a low profile on this issue. 政府力图在这个问题上保持低姿态。
- The singer forced his low notes. 那位歌手勉强唱出低音。
- He because of bashful but low head. 他因羞愧而低下了头。
- Studies of High k Dielectric Materials on Bulk Si and SOI and Their Applications 体Si和SOI上高k介质材料研究和应用探索
- The ship lay keeled over at low tide. 那艘船因退潮而倾覆。
- The Growth and Properties of Tb-doped ZnO Films and High K Dielectric Er_2O_3 Films Tb掺杂ZnO薄膜和高K栅介质Er_2O_3薄膜的制备及特性研究
- My home town lies low in a hidden valley. 我的家乡位于一个隐蔽的山谷里。
- Low grades are getting Hellen down. 低分数使海伦闷闷不乐。
- After a brief rally share fall back to a new low. 股票经过一次短暂回升后回落到一个新的低点。
- Talking in a low voice were a man and a woman. 低声讲话的是一男一女。
