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- directional plasma etch 定向离子刻蚀
- An in-situ particle monitor was installed on a plasma etch tool chamber.This article includes a discussion of two major problems detected on the plasma etch tool within a three-week period. 在等离子体蚀刻工具主舱内安装一个现场粒子监测器,对两个主要问题进行了三周的测试并展开了讨论。
- The reactor is capable of working in the RIE (reactive ion etching) mode and also in the plasma etching mode. 反应腔拥有在RIE(反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。
- Plasma Etch Advanced Process Control ( In-situ Endpoint Detectors ) 等离子刻蚀过程控制(在线终点探测器)
- The proposed methodologies are applied to detection and classification faults for a particular tool function of a plasma etcher in semiconductor fabrication. 针对所提出的方法，实际应用于半导体制造之电浆蚀刻的机台参数的错误侦测及鑑别，并得之验证。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab-built ECR plasma etching system. 摘要电子迴旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- This thesis considers the delamination behaviors between substrate and molding compound for Ball Grid Array (BGA) products caused by the plasma etching process. 中文摘要本文针对阵列锡球封装产品基板和胶饼间所产生的分层作研究。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab built ECR plasma etching system. 电子回旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- She cast her eyes down to avoid direct eye contact. 她垂下双目以避免对视。
- We fabricate desired structured surfaces by holographic lithography, plasma etching and Teflon coating.The performance is evaluated by measuring the reflectance spectrum and contact angle. 实验上，我们采用全像微影术、电浆蚀刻以及旋镀铁氟龙的方式来制作试片，并量测该试片的反射频谱和接触角。
- I'll book you on a direct flight to London. 我将为你预订直飞伦敦的航班。
- Abstract: The characteristics and progress of lithography technique and plasma etching technology are summarized.Their physical mechanisms and current research problems are also explained. 文摘:介绍了光刻与等离子体刻蚀技术的特点与进展，阐述了等离子体刻蚀的物理机制与前沿问题.
- He has chosen the most direct route. 他选取了最直的路线。
- Keywords inorganic non-metallic materials;diamond thick films;plasma etch;grain boundary;abradability; 无机非金属材料;金刚石厚膜;等离子体刻蚀;晶界;耐磨性;
- She's very direct, believes in speaking her mind. 她为人直率，喜欢有什么说什么。
- Can you direct me to the shoe department? 请告诉我卖鞋部在哪里。
- Be there a direct train for Beijing to Nanning? 从北京到南宁有直达车吗？
- Having no particular directional characteristics. 无定向的具有无特定方向的特征
- See that direct heat does not play on it. 当心别让它直接受热。
- The Research on Plasma Etching Photoresists 等离子体腐蚀去胶的探讨
