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- Deep Reactive Ion Etching System 深反应离子蚀刻系统
- Study on Deep Reactive Ion Etching of SU-8 Photoresist SU-8光刻胶氧刻蚀的研究
- Study on Deep Reactive Ion Etching of Commerical Polymethlmethacrylate Film 有机玻璃的反应离子深刻蚀
- Study on Deep Reactive Ion Etching of Polymethylmethacrylate Sheet Microstructure 商品有机玻璃片微结构的深刻蚀研究
- STUDY ON DEEP REACTIVE ION ETCHING OF SILICON USING SF_6/CCl_2F_2 WITH O_2 ADDITION SF_6/CCl_2F_2反应离子深刻蚀硅中加O_2的研究
- deep reactive ion etching 深反应离子刻蚀
- Deep Reactive Ion Etching(DRIE) 深度反应离子刻蚀
- The reactor is capable of working in the RIE (reactive ion etching) mode and also in the plasma etching mode. 反应腔拥有在RIE(反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。
- Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching (ECR-RIE) equipment to improve its property of weave. 摘要采用微波电子回旋共振等离子体反应离子刻蚀(ECR-RIE)装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
- The experiment of fully automatic reactive ion etching on 3 inch GaAs wafer is described. 介绍了全自动反应离子腐蚀3英寸GaAs片的实验研究工作。
- The arrays were subsequently treated with reactive ion etching (RIE) to slightly reduced the size of the sphere. 制程的开发首先利用黄光微影制作有高低差的沟槽图样，再将单层奈米球排入沟槽之中。
- Reactive ion etching (RIE) process utilized to form giant magnetoresistive (GMR) spin valve sensing elements was investigated experimentally. 对巨磁电阻自旋阀磁场传感器制作中的关键技术之一:自旋阀薄膜的反应离子刻蚀(RIE)工艺,进行了试验研究。
- Yak hairs were treated by the microwave electron cy cl otron resonance plasma reactive ion etching(ECR-RIE) equipment to improve its property of weave. 采用微波电子回旋共振等离子体反应离子刻蚀(ECR-RIE)装置对牦牛毛纤维进行表面改性,从而改善牦牛毛的可纺性。
- A two-dimensional (2D) physical model of reactive ion etching (RIE) which includes isotropic and anisotropic components is presented.The physical model is analyzed. 摘要反应离子刻蚀(RIE)的二维物理模型，包括各向同性和各向异性两部分。
- The influence of chamber pressure,gas flow rate and RF power on micro loading effect in reactive ion etch of silicon dioxide is researched. 结果表明,通过对反应室压力、刻蚀气体流量和射频功率的调节,可以降低微负载效应的影响,得到良好的刻蚀均匀性。
- Narrow gap reactive ion etching system 狭窄间隙反应性离子蚀刻系统
- Triode reactive ion etching system 三极型反应性离子蚀刻系统
- Reactive Ion Etching of Diamond Films 金刚石薄膜的反应离子刻蚀
- Characteristics of Reactive Ion Etching of BST Thin Film BST薄膜的反应离子刻蚀研究
- Study on Anisotropic Etching in Reactive Ion Etching of PMMA 反应离子刻蚀PMMA的各向异性刻蚀研究
