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- It is shown that the bulk etching rate as a function of etching temperature can be described by Arrhenius equation Vb=ae-E/KT. 研究结果表明;体蚀刻速度与蚀刻温度遵守Arr-henius方程V_b=a·e~(-E/KT);其中;体激活能E=0.;66±0。
- bulk etch rate 体积开蚀速率
- More often, all of the materials exposed to the etchant have a finite etch rate. 通常，所有暴露在刻蚀剂中的材料都具有一定的刻蚀速率。
- A local etch rate and a local deposition rate are computed from neutral fluxes, surface chemical coverage, and surface material type that are solved simultaneously. 根据同时求解的中性通量、表面化学覆盖和表面材料类型便可计算出局部刻蚀速率和局部堆积速率。
- Such systems, limited to low-pressure operation where etch rates are low, have yielded highly anisotropic features in GaAs films. 在低压、低刻蚀速度时，这种方法可制出高度各向异性的砷化镓薄膜。
- Etch rate and selectivity are examined as a function of SF6, flow, O2 flow, CHF3 flow, pressure and the RF power in order to optimize etching condition. 为了优化刻蚀条件，将刻蚀速率和选择比表示为SF6、O2、CHF3各自的流最以及气压和射频功率的函数。
- Keywords etch rate;diffusion;diamond;iron; 刻蚀速率;扩散;金刚石;铁;
- In MEMS fabrications for devices and systems, inductively coupled plasma (ICP) etching is a popular technology owing to its convenient operation, excellent anisotropy, high etch rate and low cost. 在MEMS器件及系统的制造中,电感耦合等离子体(ICP)对硅片的刻蚀工艺由于具备操作简单、各向异性性能好、刻蚀速率快、成本低等特点,是目前实现高深宽比结构制造的主流工艺。
- At this rate we won't be able to afford a holiday. 照这样下去，我们不会有时间／钱去度假的。
- Do they charge carriage by bulk? 他们是否按体积计算运费？
- The effects of composition of etchant, etching temperature and etching time on etching rate are also investigated. 通过研究刻蚀剂组份、刻蚀时间、刻蚀温度对刻蚀速率的影响,可提供合适的刻蚀剥层方案。
- In most markets you can buy fresh fruit in bulk. 在大多数市场上可买到散装新鲜水果。
- The first passivation layer has a first etching rate with respect to an etching agent. 第一钝化层具有与蚀刻剂相关的第一蚀刻率。
- The bulk of the work has already been done. 大部分工作已经完成。
- However, the relation between the etching rate and laser fluence appears nonlinearly. 在高雷射能量密度时则为一极平坦的连续表面。
- The elephant lowered its great bulk. 大象蹲下它庞大的身躯。
- During copper etching,the cuprous ion concentration in the etchant would increase which causes an etching rate reduction. 随着蚀铜过程的进行,蚀铜液中的一价铜离子浓度不断增加,造成蚀铜液的蚀铜能力下降。
- Then the excimer laser etching on polymethyl methacrylate (PMMA) plate mechanism is studied, with the etching rate curves listing by experiments. 研究了准分子激光对聚甲基丙烯酸甲脂(PMMA)基片的刻蚀机制，获得了刻蚀曲线。
- He heaved his huge bulk out of the chair. 他挺起巨大的身躯，从椅子上站了起来。
- The relation between etching rate, sidewall roughness and RF power and Oxygen rate is deeply investigated by implementing careful research on RIE. 在RIE中，离子轰击的作用，会在波导侧壁形成起伏结构，增加了器件的散射损耗。
