This paper presents a method for estimating harmonic admittances of the induction motor used for the sensorless monitoring of a mechanical system driven by the motor. 摘要提出一種應用於感應電機驅動的機械系統無感測器監測的諧波導納估計方法。
It includes two wet process tanks and the rotatable lifter robot, which helps transfer the wafer basket from one tank to the other, and can be driven by the cylinder or motor. 由兩個獨立的濕處理工藝槽和旋轉升降機械手組成，機械手負責將基片籃在兩個工藝槽之間轉換，機械手可以是氣缸或者電機驅動。
