With the principles and processes of photolithography,dry etching and wet etching,the fabrication of the head slider were experimented.

• 然后利用光刻、湿法刻蚀和干法刻蚀的工艺及设备,分别进行了该磁头滑块结构的湿法和干法刻蚀试验,给出了刻蚀参数及所加工的磁头照片;