To design and optimize a 3D micro electro-mechahical system(MEMS) micro tactile sensor for dimension measurement of micro structure, a mechanical module of sensor under transverse load is presented.是什么意思_To design and optimize a 3D micro electro-mechahical system(MEMS) micro tactile sensor for dimension measurement of micro structure, a mechanical module of sensor under transverse load is presented.在线翻译_英语_读音_用法_例句