This paper introduces the development of the MEMS at home and abroad,besides the key technology,the application in medicine and military about the MEMS also expounded in detail.

 
  • 本文介绍了MEMS国内外发展状况和关键技术,并对MEMS在医学和军事领域的应用作了详细阐述。英文翻译,英语:
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