The kinetics of the electrode reaction is preliminarily studied by linear potential sweep technique and electrochemical impedance while electrodepositing Ni for high aspect ratio structures.

• 采用线性电位扫描和电化学交流阻抗等电化学测量技术,对高深宽比掩膜条件下微电铸镍的电极反应动力学过程进行了初步研究。