The fabrication precision of the 1D nano-scale sample-plate with 7 grating lines, such as critical dimensions, linearity as well as parallelism of the gratin...

• 用该方法分别制备了5条栅线和7条栅线的一维纳米结构样板,并对7条栅线的纳米结构样板的精度和不确定度影响因素进行了分析。