The C ions elastic recoil detection analysis (C-ERDA) was used to measure the helium concentration and depth profile. It was suggested that the helium depth distribution is homogeneous in the film.

• 实验中利用碳原子弹性前冲散射分析(C-ERDA)来测量氦原子的浓度及深度分布，结果证明氦在薄膜中的分布近似均匀。