TDDB evaluation experiments are implemented on the thin gate oxides MOS capacitor,and a method of precise measurement and characterization the trap density and accumulative failure are presented.

• 采用恒定电流应力对薄栅氧化层MOS电容进行了TDDB评价实验,提出了精确测量和表征陷阱密度及累积失效率的方法。