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- surface micromachining processing 加工工艺
- To meet the needs of surface micromachining and CMOS process,reasonable test structures and their improvements for measuring thermal conductivity of the MEMS thin films are required. 对表面加工和CMOS工艺,需要进行测试结构的合理设计和提高薄膜热导率测量的精确度。
- A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology. 基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关。
- The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR. 随着悬浮线圈内径增加，悬浮力呈线性增加。
- Using surface micromachining, the sector plates are fabricated to verify the theoretical analysis. 利用面型微细加工制程，扇行平板结构被制造出来用以验证理论分析。
- Furthermore, the surface micromachining is able to fabricate various optical devices, hinges and latches for integrating with micro bench. 第三则是藉由面型微加工技术可制作各式各样微光学元件、微绞链及微卡榫，整合于微平台上。
- Although MEMS devices are generally fabricated using the surface micromachining technologies that develop from IC fabrication technologies. 虽然微型机电系统的制造通常使用基于集成电路工艺的平面制造技术,但由于MEMS器件的三维特性,使它与IC的制造有很大不同。
- The circular plates have been successfully fabricated through surface micromachining to examine the feasibility of the proposed nondimensional numbers. 当>0.;9903，结构不会被吸附，而当<0
- Four fundamental manufacturing technologies namely bulk micromachining,surface micromachining,moulding and wafer bonding are introduced for Micro Electro Mechanical System(MEMS). 介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
- An effective micromachining process is developed to improve the reliability of the metal wire in the multi-sensor and to avoid adhesion between the PYREX glass and silicon mass in the process of anodic bonding. 针对芯片上各电阻间金属引线的可靠性问题和加速度传感器质量块吸附问题提出了有效的改进方法。
- The advantages of microcap are superior to the thin film poly-silicon made by the surface micromachining technique on the quality and mechanical properties. 藉由此电铸技术所制作的微金属帽盖与微机械加工技术所制作的薄膜聚合矽而言，微电铸技术制程优点多且品质较好。
- For the detector design ,MEMS surface micromachining techniques were incorporated toFabricate a simple micro polysilicon air-bridge heater filament with integrated polysilicon electrodes. 有关这个检测器的设计，是将MEMS表面微切削加工技术与带有集成的多晶硅电极的简单微多晶硅空运线加热丝的制作结合在一起。
- non--silicon surface micromachining 非硅表面微加工
- non-silicon surface micromachining 非硅表面微加工
- The art or process of applying gilt to a surface. 镀金，涂金在表面镀金的过程或技术
- Keywords MEMS;CAD;Solid Model;Process Feature;Process Feature Model;Layer Model;Mask Synthesis;Mask Verification;Surface Micromachining; 计算机辅助设计;实体模型;工艺特征;工艺特征模型;工艺层模型;可制造性评价;掩模综合;掩模验证;表面微加工工艺;
- The gas bubbled to the surface of the water. 气体变成气泡升上水面。
- The surface of the liquid gradually crusted over. 液体表面渐渐地结了一层皮。
- A breeze ruffled the surface of the lake. 一阵微风吹皱了湖面。
- A wave broke across the surface of the pool. 一个波浪从池水表面掠过。
