Orthogonal design was used to the experimental preparation of CrNx thin films on the surface of GCr15 block gage by 16 hot cathode ion plating technologies wih 4 levels and 5 factors,ie. ,L16(45).

 
  • 用正交设计法L16设计了五因素四水平共16种工艺,用热阴极离子镀在GCr15块规上制备CrNx薄膜。
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