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- OPC (Optical Proximity Correction) has developed to be a part of EDA framework, which is primarily used to increase the achievable resolution and pattern transfer fidelity. 光学邻近效应修正(Optical Proximity Correction，OPC)已成为半导体制造不可缺少的技术，同时发展为电子设计自动化(Electronic Design Automation，EDA)框架中的重要组成部分。
- Research on Optical Proximity Correction Technology 集成电路光学校正技术研究
- Optical Proximity Correction (OPC) 光学邻近效应校正
- optical proximity correction( OPC ) 光学邻近校正
- OPC(optical proximity correction) 光学邻近效应
- Important Works About Rules in Rules-Based Optical Proximity Correction 基于规则的光学邻近矫正中规则的相关处理
- Experimental research for optical proximity correction by using coding gray tone mask 用灰阶编码掩模进行邻近效应校正的实验研究
- Optical proximity correction for improving pattern quality in submicron photolithography 光学邻近校正改善亚微米光刻图形质量
- DOF;exposure latitude;rule-based;OAI;process windows;OPC;optical proximity correction;45 nm 规则法;微影制程;偏轴照射;聚焦深度;曝光宽忍度;制程窗口;光学临近效应修正;45奈米
- Keywords Lithographic Simulation;Optical Proximity Effect;Design For Manufacturability;Optical Proximity Correction;Layout Verification; 光刻仿真;光学邻近效应;可制造性设计;光学邻近校正;版图验证;
- Optical Proximity Correction;OPC;Dynamic Programmable Logic Array;DPLA;Optical Proximity Effect;OPE;Critical Dimension;CD 关键词:光学邻近修正;动态可程式规划逻辑阵列;光学邻近效应;关键尺寸
- Lithography;Integration;Design for manufacturability (DFM);Optical proximity correction (OPC);Phase-shifting mask (PSM);Off-axis illumination (OAI);Assist feature 关键词:微影技术;集积度;可制造性导向设计;光学邻近修正;相位移光罩;偏轴照射;辅助图案
- Optical Proximity Correction 光学邻近校正
- The aerial image qualities of depth of focus (DOF) and optical proximity effect are simulated with the lithography simulation software PROLITH. 利用光刻仿真软件PROLITH,进行了掩模版空间成像的焦深(DOF)和光学临近效应的仿真。
- Optical proximity effect correction(OPC) 光学邻近效应校正
- electron beam Proximity correction 电子束邻近效应校正
- His optic nerve was hurt in an accident. 他的视神经在一次事故中受到损伤。
- Optical Microlithography with Phase-Shifting Mask and Optical Proximity Effect Correction 相移掩模和光学邻近效应校正光刻技术
- Microscopes and telescopes are optical instruments. 望远镜和显微镜是光学仪器。
- The optic theory originated with Einstein. 光学理论是爱因斯坦首创的。
