MEMS technology used in the adaptive optics will bring an important influence. Based on this purpose some novel deformable mirrors were discussed in the theory and fabrication process.

• 摘要将MEMS技术用于自适应光学系统具有重大意义。本文从原理及制作工艺上论述了几种新型的可变形反射镜，为下一步的深入研究打下基础。