It is shown that ion current is a power function of pressure,independently of the magnetic field strength, providing the magnetic field is over a critical value.

 
  • 分析表明,当磁场强度大于某一临界值时,磁控放电的离子电流与磁场强度无关;离子电流是压强的幂函数,且与所测真空器件电极的表面状况和几何结构有关。
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