It is found that the simulation results are good agreement with that of experiments,and more accurate compared with that of a single physical model and that of the Bethe formula with no consideration on the contribution of the secondary electron.

• 发现模拟结果与实验结果很好地吻合,这比采用单一的散射模型和不考虑二次电子的Bethe公式得到的模拟结果更加符合实际的电子散射过程,其精度更高。