From the SEM micrographs of silicon and ceramic cutting surfaces, we know that the most noticeable feature on the cutting surface is the long and deep grooved scratches and deeper cave.

• 通过观察加工表面发现:两种材料的加工表面都存在断续划痕和凹坑,且因为陶瓷断裂韧性高,陶瓷加工表面质量优于硅晶体。