Experimentally, calibration results with a high precision commercial PZT show that a displacement measurement accuracy of nanometers scale is achieved in the common laboratorial environment.

 
  • 实验上,用高精度的商用压电陶瓷标定的结果验证了这种正弦相位调制自混合干涉仪在普通实验室噪声环境中可以达到纳米级的位移测量精度。
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