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- The optimization of the structure of a polycrystalline silicon thin film transis tor by excimer laser crystallization of amorphous silicon and its fabrication pr ocess have been discussed. 讨论了用准分子激光诱导非晶硅晶化法制备多晶硅薄膜晶体管的结构与工艺优化问题。
- Keywords calcium fluoride;crystal growth;excimer laser microlithography;laser crystal;Q-switch; 氟化钙;晶体生长;准分子激光光刻;激光晶体;Q开关;
- Excimer laser crystallization 准分子激光晶化
- The traditional ways to obtain polycrystalline film include solid phase crystallization (SPC), low pressure chemical vapor deposition (LPCVD) and excimer laser annealing (ELA). 目前常用的几种获得多晶薄膜的方法包括:低压化学气相沉积、固相结晶、准分子激光晶化等。
- Raman Spectroscopy Analysis of Excimer Laser Crystallized Amorphous Silicon Films 准分子激光诱导结晶硅膜的Raman光谱分析
- Do Intact Viral Particles Survive Excimer Laser Ablation? 准分子激光削融后有完整的病毒颗粒存活吗?
- Pulsed Laser Deposition using Excimer Lasers. 应用准分子激光器的脉冲激光沉积。
- Beam Homogenizer for XeCl Excimer Laser and Its Applications[J]. 引用该论文 高鸿奕;楼祺洪;董景星;宁东;魏运荣;叶震寰.
- Issues and solutions in femtosecond laser and VISX excimer laser settings. 飞秒激光和VISX准分子激光设置中的问题和解决方案。
- Study on thermal conductivity of the YAG and GGG laser crystal[J]. 引用该论文 王保松;江海河;贾先德;张庆礼;孙敦陆;殷绍唐.
- Investigation of AlN Thin Films Prepared by Pulsed Excimer Laser Deposition[J]. 引用该论文 黄继颇;王连卫;高剑侠;林成鲁;周艳萍.
- Clinical analysis of Excimer Laser Photorefractive Keratectomy for myopia. 准分子激光屈光性角膜切削术治疗近视的临床分析。
- A Novel Homogenizer to Improve the Excimer Laser Beam Uniformity[J]. 引用该论文 李红霞;楼祺洪;董景星;叶震寰;魏运荣;凌磊.
- The excimer laser remelting, alloying, and depositing wore mainly looked at. 着重评述了准分子激光重熔、合金化及其沉积。
- Polycrystalline silicon thin film fabricated with novel laser crystallization. 多晶硅薄膜的新型激光晶化制备方法。
- An excimer laser with beam delivery system for corneal radial keratotomy[J]. 引用该论文 袁才来;王书泽;乐耀康;蒋宝财;徐松庆.
- The principle and implementing of excimer laser photorefractive keratectomy[J]. 引用该论文 叶寒;廖文和;沈建新;林振能.
- The uniformity of the thin film transistor fabricated by excimer laser annealing (ELA) of amorphous Si with metallic (Cr/Al) photonic crystal structure has been substantially improved. 具备金属(铬/铝)光子晶体排列的非经矽经过雷射退火后,所制成之薄膜电晶体之电性均匀度已经被有效改善。
- The excimer laser refractive surgical instrument can be used to correct myopia, hyperopia astigmatism diopter. 摘要准分子激光眼科治疗机可以用来进行近视、远视、散光等屈光不正的矫正手术。
- Temperature distribution of monocline laser crystal in operation process[J]. 引用该论文 沈鸿元;张戈;黄呈辉;位民;陈振强.
