For this aim, the model-driven method is introduced to design MARP. 为此,将模型驱动方法引入到制造联盟资源计划的开发中。
Nanolithography experiments were presented to verify the effectiveness of the new actuating method and positioning error compensation method. 纳米刻画实验验证了该新型驱动方法及误差补偿的有效性。