This paper presents a method for estimating harmonic admittances of the induction motor used for the sensorless monitoring of a mechanical system driven by the motor. 摘要提出一种应用于感应电机驱动的机械系统无传感器监测的谐波导纳估计方法。
It includes two wet process tanks and the rotatable lifter robot, which helps transfer the wafer basket from one tank to the other, and can be driven by the cylinder or motor. 由两个独立的湿处理工艺槽和旋转升降机械手组成，机械手负责将基片篮在两个工艺槽之间转换，机械手可以是气缸或者电机驱动。
