Compact Plasma Focus (CPF) device (NX2) operating in neon with high performance and high repetition rate is developed and used as an intense Soft X-Ray (SXR) source for microelectronics lithography.

• 我们研制了一套以微电子光刻为应用背景的紧凑型高重复率、高性能、工作气体为氖气的等离子焦点装置(NX2)做为软X射线源。