After calculation and computer simulation, it is proved that by using this lens demagnified images for large object field with a sub-micron resolution and without crossover can be obtained.

 
  • 理论表明,利用这种磁浸没透镜能在无交叉截面下产生缩倍的聚焦像,这为该透镜应用于深亚微米电子束曝光系统中提供了理论依据。
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